发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a semiconductor device by using a SOI substrate whose parasitic capacitance is reduced while a fluctuation of parasitic bipolar by a substrate floating effect and a threshold voltage by a support substrate bias is prevented and to provide a manufacturing method of the structure. SOLUTION: In the semiconductor device using the SOI substrate, a P well diffusion layer or an N well diffusion layer is formed only in a body region being a lower part of a gate electrode in a semiconductor thin film layer. COPYRIGHT: (C)2004,JPO
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申请公布号 |
JP2003318408(A) |
申请公布日期 |
2003.11.07 |
申请号 |
JP20030007858 |
申请日期 |
2003.01.16 |
申请人 |
SEIKO INSTRUMENTS INC |
发明人 |
HASEGAWA TAKASHI;OKAMOTO TAKAYUKI;OSANAI JUN |
分类号 |
H01L27/08;H01L21/336;H01L21/8238;H01L21/84;H01L27/092;H01L27/12;H01L29/45;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 |
主分类号 |
H01L27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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