APPARATUS FOR PRECISE POSITION CONTROL AND METHOD THEREFOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for precise position control and a method therefor using the same for correcting errors caused by changes in optical characteristics of an optical system.

SOLUTION: The apparatus for the precise position control comprises: a control unit for controlling an amount of movements of a mobile unit; an optical system for imaging the mobile unit and generating image signals; and a monitor for outputting the image signals on a screen. The apparatus measures an actual moving distance of the mobile unit and a number of pixels equivalent to the actual moving distance to calculate actual distance per unit pixel on the screen of the monitor, and controls the amount of the movements of the mobile unit by using the actual distance per the unit pixel when the mobile unit moves from one point to other point.

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