| 摘要 |
PROBLEM TO BE SOLVED: To obtain a thin-film magnetic head which does not require deposition of alumina and permits easy control of the film thickness of a lower shielding layer and a method for forming a partial lower shielding layer of the thin-film magnetic head. SOLUTION: The thin-film magnetic head having multilayered films exhibiting a magnetoresistive effect between the upper shielding layer and lower shielding layer to be formed on an AlTic substrate 11 is formed with a recessed part 12a for delineating the lower shielding layer in an under layer 12 existing on the surface of the AlTic substrate 11 and is provided with the lower shielding layer 13 consisting of NiFe within this recessed part 12a. An SiO<SB>2</SB>film 19 is interposed between the under layer 12 and the lower shielding layer 13. COPYRIGHT: (C)2004,JPO |
