摘要 |
PROBLEM TO BE SOLVED: To complete the sealing by a sealing material. SOLUTION: A contact part between the sealing material 14 and an island sealing material 18 is added to the contact part between the sealing materials 14 as a contact part clogging a gas distribution opening for the sealing material 14. This constitution can elongate the length of the contact part and completely perform the sealing. COPYRIGHT: (C)2004,JPO
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