| 摘要 |
PROBLEM TO BE SOLVED: To provide a flare measuring device for quantitatively determining data about an optical flare occurred in an optical system. SOLUTION: The flare measuring device S comprises an illuminating optical system IL and a shape sensing device ST. In the illuminating optical system IL, a first pattern 10 including a light transmitting section T is irradiated by an illuminating light, each of a plurality of regions on a photosensitive substrate P is exposed to a different amount of light via the first pattern 10 and a projection optical system PL, a second pattern 11 including a light shielding section C is irradiated with the illuminating light, and the accumulated value on the photosensitive substrate P is so adjusted that each of the plurality of regions thereon is exposed to a different amount of light via the second pattern 11 and the projection optical system PL. In the shape sensing device ST, the states of formation of the first pattern 10 and the second pattern 11 in each region on the photosensitive substrate P are sensed and, based on the outcome, flare- related data are determined. COPYRIGHT: (C)2004,JPO
|
