| 摘要 |
PURPOSE: Semiconductor device manufacturing equipment is provided to be capable of preventing process failure, and improving the reliability of processes and the manufacturing yield of a semiconductor device by previously checking the error of the pressure generated in a chamber. CONSTITUTION: A semiconductor device manufacturing equipment is provided with a door(22) for switching a gate formed between neighboring chambers by using a driving part(24) according to a supplied control signal and a vibration detecting sensor(40) installed on the door for detecting the vibration of the door. The semiconductor device manufacturing equipment further includes pressure sensors for detecting the pressure state of each chamber, a controller(42) for supplying a control signal to the driving part, and an output part controlled by the controller for displaying whether the state of the equipment is normal, or not, according to the signal of the vibration detecting sensor.
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