发明名称 Self-aligned source pocket for flash memory cells
摘要 An improved method for forming a flash memory is disclosed. A self-aligned source implanted pocket located underneath and around the source line junction is formed after the field oxide between adjacent word lines is removed, and before or after the self-aligned source doping is carried out, so that the configuration of the implanted boron follows the source junction profile.
申请公布号 US2003205747(A1) 申请公布日期 2003.11.06
申请号 US20030457471 申请日期 2003.06.10
申请人 CHEN CHUN 发明人 CHEN CHUN
分类号 H01L21/425;H01L21/76;H01L21/8236;H01L21/8247;H01L27/108;H01L27/115;H01L29/76;H01L29/788;H01L29/94;(IPC1-7):H01L27/108 主分类号 H01L21/425
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