FLUID CONTROLLER

摘要

A fluid controller, wherein tape heaters (11) are disposed on both sides of lines (A) and (B), a plurality of clearances for storing tape heater holding clips (13) are provided between fluid control devices adjacent to each other in the lines (A) and (B), the tape heaters (11) are held in the lines (A) and (B) by the clips (13) holding the tape heaters from both sides thereof, the lines (A) and (B) with heater are installed on line support members (10) detachably installed on a base member (1), and heater insert holes (14) extending in longitudinal direction are provided in the line support member (10) and sheath heaters (12) are inserted into the holes (14).