发明名称 OPTICAL SWITCH BASED ON ROTATING VERTICAL MICRO-MIRROR
摘要 A MEMS-based device to steer and manipulate beams of light traveling in free-space in an optical switch. The optical switch is based on a rotating vertical micro-mirror constructed on a surface of a substrate. At least one input optical fiber is arranged to direct at least one optical signal through free-space along a first optical path parallel to the surface of the substrate. A plurality of output optical fibers are arranged to receive the optical signal traveling through free-space along other optical paths not co-linear with the first optical path. At least one substantially vertical, rotating micro-mirror assembly is constructed on the substrate. The assembly includes a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear. The rotating micro-mirror is rotatable between a first position not in the first optical path and at least a second position redirecting the optical signal to one of the output optical fibers.
申请公布号 WO02061487(A8) 申请公布日期 2003.11.06
申请号 WO2001US18782 申请日期 2001.06.08
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 HAMERLY, MIKE, E.;SMITH, ROBERT, G.;THEISS, SILVA, K.;WEAVER, BILLY, L.
分类号 B81B3/00;G02B6/32;G02B6/35;G02B26/08;(IPC1-7):G02B26/02 主分类号 B81B3/00
代理机构 代理人
主权项
地址