发明名称 |
ADJUSTABLE FOCUSING COMPOSITE FOR USE IN AN OPTICAL PROFILOMETER SYSTEM AND METHOD |
摘要 |
An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.
|
申请公布号 |
WO03091661(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
WO2003US13077 |
申请日期 |
2003.04.25 |
申请人 |
MASSACHUSSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
NIELSON, GREGORY, N.;BARBASTATHIS, GEORGE |
分类号 |
G01B11/24;G01B11/30;(IPC1-7):G01B11/30 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|