| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring apparatus using a Michelson interferometer allowing high-precision measurement and facilitating adjustment by a compact structure. SOLUTION: The Michelson interferometer 1 of the thickness measuring apparatus 100 comprises two optical cables 4, 5 connected with an optical coupler 3. The optical cables 4, 5 comprise a polarization maintaining optical fiber 41 or the like connected with an optical connector 42 or the like. The angular position of the optical connector 42 or the like is adjusted by rolling the optical fiber 41 or the like, which are connected to the optical connector 42 or the like, around the optical axis thereof. COPYRIGHT: (C)2004,JPO
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