Integrated lead suspension for use in a disk drive using a tri-metal laminate and method for fabrication

摘要

An example of a method for forming a multi-layer structure which may be used for supporting a transducer includes providing a support layer and forming a etch stop layer from a refractory metal on the support layer. A first electrically conducting layer of copper may be formed on the etch stop layer. A dielectric layer may be provided on the first electrically conducting layer. A second electrically conducting layer of copper may be provided on the dielectric layer. The dielectric layer is positioned between the first electrically conducting layer and the second electrically conducting layer. The second electrically conducting layer may be etched to form a plurality of separate electrically conducting lines.