| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly accurate motion guide unit with a hydrostatic gas bearing which is usable under special environments such as a high vacuum condition, and a gas atmosphere. SOLUTION: A hydrostatic bearing unit is provided with a moving body 2 as a moving portion, a standard surface plate having a reference surface, a gas supply portion 3 supplying a fluid into a fine gap from the moving body 2, a plurality of gas discharging grooves 4a, 4b, and 4c arranged to the outside of the gas supply portion 3, and an absorbing means acting absorbing force between the moving body 2 and the reference surface. The hydrostatic bearing unit floats up against the reference surface by jetting the gas out of the gas supply portion 3. The jetted gas is collected from the plurality of gas discharging grooves 4a, 4b, and 4c. COPYRIGHT: (C)2004,JPO |
