摘要 |
PROBLEM TO BE SOLVED: To provide a surface texture measuring machine and a surface textures measurement method for measuring surface textures even to a workpiece having diversified surface textures. SOLUTION: The surface textures measuring machine comprises: a stylus 724 for scanning the surface of an object to be measured; a direct-acting mechanism 74 for slightly displacing the stylus 724 in an axial direction according to the surface shape of the object to be measured; and a scanning mechanism for moving the stylus 724 in a scanning direction along with the direct-acting mechanism 72, thus measuring the surface textures of the object to be measured from the amount of displacement in the stylus 724. In the surface textures measuring apparatus, a rocking support mechanism 75 for adjusting the posture of the stylus 724 within a surface that is formed by the normal direction and scanning direction of a measurement surface, and an arc displacement sensor 76 for detecting the posture of the stylus 724 are provided. COPYRIGHT: (C)2004,JPO
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