发明名称 SURFACE TEXTURE MEASURING MACHINE AND METHOD THEREFOR, AND MEASURING PROBE
摘要 PROBLEM TO BE SOLVED: To provide a surface texture measuring machine and a surface textures measurement method for measuring surface textures even to a workpiece having diversified surface textures. SOLUTION: The surface textures measuring machine comprises: a stylus 724 for scanning the surface of an object to be measured; a direct-acting mechanism 74 for slightly displacing the stylus 724 in an axial direction according to the surface shape of the object to be measured; and a scanning mechanism for moving the stylus 724 in a scanning direction along with the direct-acting mechanism 72, thus measuring the surface textures of the object to be measured from the amount of displacement in the stylus 724. In the surface textures measuring apparatus, a rocking support mechanism 75 for adjusting the posture of the stylus 724 within a surface that is formed by the normal direction and scanning direction of a measurement surface, and an arc displacement sensor 76 for detecting the posture of the stylus 724 are provided. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003315034(A) 申请公布日期 2003.11.06
申请号 JP20020118173 申请日期 2002.04.19
申请人 MITSUTOYO CORP 发明人 HONDA HIROOMI
分类号 G01B21/20;G01B21/00;G01B21/30;(IPC1-7):G01B21/20 主分类号 G01B21/20
代理机构 代理人
主权项
地址
您可能感兴趣的专利