METHOD FOR THE PRODUCTION OF A NITRIDE COMPOUND SEMICONDUCTOR BASED SEMICONDUCTOR COMPONENT

摘要

The invention relates to a method for the production of a nitride compound semiconductor based semiconductor element. In a first step of the inventive method, a semiconductor body (1) containing at least one nitride compound semiconductor is provided. A metal layer is applied to the surface (6) of the semiconductor body (1) in a second step. In a third step, the semiconductor body (1) is subsequently structured, whereby part of the metal layer (7) and parts of the semiconductor body (1) located thereunder are removed.