| 摘要 |
PROBLEM TO BE SOLVED: To provide a material constant measurement instrument for a piezoelectric substrate cut from a piezoelectric single crystal for the purpose of accurately evaluating uniformity of the piezoelectric single crystal in a short time. SOLUTION: The material constant measurement instrument is provided with a frequency measurement section for measuring resonance frequency of thickness slide vibration at an arbitrary position sandwiched between two frequency measurement probes 12 and 13, disposed sideways of both sides of the piezoelectric substrate cut from the piezoelectric single crystal; and a thickness measurement section for measuring thickness of the substrate P at an arbitrary position sandwiched between two spindles 21a and 22a respectively, disposed sideways of both sides of the substrate P by bringing the two spindles 21a and 22a into contact with the two sides of the substrate P. In the instrument, the probe 12 and the spindle 21a disposed sideways of the same side of the substrate P are arranged in proximity to each other, and the probe 13 and the spindle 22a disposed sideways of the other side are arranged in proximity to each other. COPYRIGHT: (C)2004,JPO
|
