| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical encoder capable of precisely measuring the moving quantity of a scale in spite of a structure in which an interferable light source and a light detector are arranged on the same plane. SOLUTION: This optical encoder 10 comprises the scale 110 mounted on a moving body and a sensor head 120 for optically detecting its movement. The scale 110 has an optical pattern 12 for detecting the moving quantity. The sensor head 120 has the interferable light source 122 for radiating optical beams to the optical pattern 112, the light detector 12 for detecting the movement of an interference pattern formed by the optical pattern 112, and a base board 142 for holding them. The sensor head 120 further has a reflection restricting film 144 or a film for suppressing the undesired excessive reflection of light. The reflection suppressing film 144 is located at least on the peripheral part of the light detector 132 except the light receiving surface of the light detector 132. COPYRIGHT: (C)2004,JPO
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