| 摘要 |
A method for making a polymer-based rare earth-doped waveguide includes the steps of: providing a substrate (11); spin coating a polymer bottom cladding layer (12) on the substrate; spin coating a core layer (13) comprising a polymer and complex rare earth metal ions, which can be excited to produce a laser, on the bottom cladding layer; using a channel patterning technique with masking and ultraviolet (UV) radiation followed by etching to form at least one channel waveguide (14); and spin coating a polymer top cladding layer (15) over the at least one channel waveguide and exposed portions of the bottom cladding layer. The method includes improving the solubility of rare earth metal ions in a polymer matrix, by forming a complex of each rare earth metal ion with an organic compound. These complexes have higher solubility in a fluorinated polymer, compared with pure rare earth metal ions.
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