发明名称 |
Optical apparatus and exposure apparatus incorporating the apparatus |
摘要 |
An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements.
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申请公布号 |
US2003206280(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
US20030446000 |
申请日期 |
2003.05.27 |
申请人 |
NIKON CORPORATION |
发明人 |
MURAYAMA MASAYUKI;NAKAMURA KYOJI;OGATA TARO;MORI SUSUMU |
分类号 |
G03F7/20;(IPC1-7):G03B27/52 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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