CORROSION-PROOF PRESSURE TRANSDUCER

摘要

A corrosion proof pressure transducer for measuring exhaust gas pressure includes a chip (42) with a semiconductive diaphragm, electronics, and conductive pads (46) thereon; with leads (48) sonically bonded to the pads. To preclude degradation of the transducer by internal combustion engine exhaust gases, the chip may have a thin glass passivation layer, a vacuum deposited polymeric coating and a layer of gel, thereon.