| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element, a substrate, a metallic mold therefor, an optical pickup device, a method for working the optical element, the substrate worked with the method and electron beam lithographic equipment which, while preventing productivity of the optical pickup device, the optical element or the like from lowering, contribute to miniaturization and price-reduction of devices by reducing the number of components and allow working of the substrate, three-dimensionally varying with the order of submicrons, for the optical element or the like used therefor. <P>SOLUTION: The optical element (an objective lens 2) has a curved surface part on at least one surface and emits light incident on the other surface side from the one surface side as emitted light. A hologram structure (3) which separates the incident light into respective directions with mutually different orders of diffraction (first-order, zero-order and negative first-order) and emits respective rays from the one surface side (2a) is disposed on at least the one surface side (2a). <P>COPYRIGHT: (C)2004,JPO |
