| 摘要 |
<P>PROBLEM TO BE SOLVED: To replace any of filters constituting a complex filter of any of respective fan filter bodies during operation of the respective fan filter bodies installed in a plurality of stages, in a clean air supply device. <P>SOLUTION: A plurality of air supply openings 4 are bored with spaces on the one-side wall surface 3 of a chamber 2, the plurality of fan filter bodies 5 are mounted and stored on respective mounting plates 11 over the plurality of stages outside the wall surface 3, and a holder 7 for storing a fan control unit 6 is fixed there. The fan filter body 5 is formed by mounting, closely to or separably from a fan case 17, the complex filter 20 formed by integrally jointing a plurality of filters 19 in the front part of the fan case 17 equipped with a fan 18, and the respective filters 19 are individually separably formed as well. <P>COPYRIGHT: (C)2004,JPO |
