| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic green sheet on which a favorable pattern can be formed by a photolithographic method by using a photosensitive paste without producing residue during developing or delamination during calcining, and to provide a method for forming a pattern. <P>SOLUTION: The ceramic multilayer green sheet consists of a layered body of a plurality of ceramic green sheets in which the binder included in at least the uppermost layer has a solvent resistance higher than that of the binder included in other layers. Preferably, the binder included in the uppermost layer consists of a copolymer of (meth)acrylic ester or its derivative and the thickness of the uppermost layer is 3 to 50% of the thickness of the whole sheet. Various kinds of patterns such as a conductor pattern and a resistor pattern can be efficiently formed by applying a photosensitive paste on the ceramic multilayer green sheet, drying, then selectively exposing according to a specified pattern and developing. <P>COPYRIGHT: (C)2004,JPO |
