INPUT-PATTERN FEEDER AND INSPECTION METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To shorten the time required for observing a waveform and to suppress the failure analytical time. SOLUTION: When an internal circuit waveform of a semiconductor device is observed, a reset circuit 19 used to output a reset signal 21 for setting a pseudorandom pattern generator 12 to an initial value is added to the pattern generator 12 so as to correspond to a specific output, a cycle of a random pattern to be output is shortened, the time required for observing the waveform is shortened, and the failure analytical time is suppressed. COPYRIGHT: (C)2004,JPO