| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a probe capable of securing sure conduction with a conductive pad. SOLUTION: This method has a process for applying photoresists 500 on both the surface and the back on a plate raw material 400 having conductivity to be processed into the probe 100, a process for masking a first mask 200 on one surface of the plate raw material 400 and a second mask 300 on the other surface respectively, a process for performing exposure and development of the photoresists 500, and a process for etching the plate raw material 400 by using residual photoresists 500 in the process for performing the exposure and the development as masking material 510. COPYRIGHT: (C)2004,JPO |
