| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrical-characteristic evaluation apparatus by which an electrical characteristic of a specimen surface layer is evaluated at low costs and with high spatial resolution and which is handled easily. SOLUTION: An electro-optical crystal 5 is installed at a tip (a part adjacent to a measuring part) of a waveguide 3 used to guide microwaves to the measuring part of a specimen 6, and the electro-optical crystal 5 is irradiated with pulsed light synchronized with a cycle of the microwaves. After reflected light and transmitted light of the pulsed light have been passed through a polarizing plate 10, the intensity of the light is detected, and the strength of an electric field near the measuring part generated by the microwaves is detected. On the basis of the strength of the electric field and on the basis of the strength of a reference electric field measured in advance regarding the specimen as a reference, the electrical characteristic of the measuring part is evaluated. COPYRIGHT: (C)2004,JPO
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