| 摘要 |
Microelectromechanical systems (MEMS) elements, optical switches and fabrication methods are described. A MEMS element (101) comprises a crystalline moveable element moveably attached to a substrate for motion substantially perpendicular to a plane of the substrate. The moveable element includes a perpendicular portion (104) oriented substantially perpendicular to the substrate. In at least one position, a part of the perpendicular portion projects beyond a surface of the substrate. The perpendicular portion and substrate have substantially similar crystal structures. The perpendicular portion may be formed from the substrate. An array of such structures can implement an optical switch. MEMS elements may be fabricated by forming one or more trenches in a substrate to define a perpendicular portion; attaching a moveable element to a first surface of the substrate; and removing a portion of the substrate such that at least a part of the perpendicular portion projects beyond a second surface. |
