| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor element having improved detection accuracy by mitigating the influence of a stress from an electrode on the sensor element. <P>SOLUTION: This semiconductor acceleration sensor element comprises a frame 1 comprising a semiconductor substrate, an overlapping part 3 supported rockably by beams 2, 2 having elasticity inside, piezo resistances 21 provided on the beam 2 and having resistance values changing by an applied acceleration, and electrodes 4 provided on the frame 1, for taking out signals from the piezo resistances 21, 21. The element has a groove 5 formed so as to encircle the electrodes 4 on the frame 1. <P>COPYRIGHT: (C)2004,JPO</p> |
