| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner for SPM (scanning probe microscope) which is miniaturized without sacrificing displacement amount and which is suitable for a high-speed scanning operation having a high resonance frequency. SOLUTION: The scanner 100 for SPM is provided with a cylindrical piezoelectric element 110 used to generate a displacement in the X-direction and the Y-direction; a stacked piezoelectric element 120 used to generate a displacement in the Z-direction; a connecting member 130 used to connect the piezoelectric element 110 to the piezoelectric element 120; a mounting member 140 fixed to the upper end of the piezoelectric element 110; and a cantilever support member 150 fixed to the lower end of the piezoelectric element 120. COPYRIGHT: (C)2004,JPO
|
