| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact which exhibits a high volume resistivity at a high temperature, and an electrostatic chuck using the same. <P>SOLUTION: The dense aluminum nitride sintered compact of particles having an average diameter of ≤4 μm is obtained by adding 0.3 to 10 mass % yttrium oxide as an aid. The aluminum nitride sintered compact is used as a dielectric layer 2 for absorbing a body 10 to be adsorbed, and the body 10 to be adsorbed is adsorbed by applying voltage to an electrode 3 provided below the dielectric layer 2. <P>COPYRIGHT: (C)2004,JPO |
