APPARATUS FOR VISUALLY INSPECTING PLATE-SHAPED OBJECT

摘要

PROBLEM TO BE SOLVED: To easily perform visual inspection when large-size boards are inverted and positioned at a visual inspection for inclining and rotating the large-size boards, to reduce the installation space of an apparatus even if it is the apparatus for visually inspecting the large-size boards, and to easily acquire various irradiation angles of illumination at the visual inspection on the boards. SOLUTION: The apparatus for visually inspecting plate-shaped objects is provided with a part for positioning the boards to be inspected for inclining and rotating the boards to be inspected; an illuminating part for highlighting defects on the boards to be inspected by irradiating the boards with illumination; an operating part for positioning and operating both the part for positioning the boards to be inspected and the illumimnating part. The part for positioning the boards to be inspected is provided with a part for lowering and positioning the location of a stage for lowering the location of the stage when the stage mounting the board to be inspected is positioned to an inverting location. The illuminating part is provided with a part for positioning reflected illumination for positioning the illuminating location of reflected illumination in forward and backward directions. COPYRIGHT: (C)2004,JPO