METHOD AND STRUCTURES FOR IMPROVED ASSEMBLY OF MEMS DEVICES EMPLOYING A CENTRIFUGE

摘要

In at least one implementation, a method is provided for assembling a MEMS device by retaining a MEMS device in a centrifuge, operating the centrifuge to generate a force sufficient to move at least one structure of at least one MEMS device. In at least one embodiment, a centrifuge adapted for assembly of MEMS devices having a mount adapted to hold a substrate so that a force generated during operation of the centrifuge is capable of actuating at least one MEMS structure.