摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-accuracy thermal flowmeter unsusceptible to the attitude of a flow path or that of the thermal flowmeter. <P>SOLUTION: Flow adjustment units 8a and 8b for providing a spiral flow in order to improve flow velocity distribution are provided in upstream and downstream sides of a flow through a detection part 1 of this thermal flowmeter. <P>COPYRIGHT: (C)2004,JPO</p> |