摘要 |
PROBLEM TO BE SOLVED: To provide a rotation introducing machine suitable for a clean environment or a vacuum environment in which a rotation introduction is effectively maintained in a stable manner without contamination due to the evaporation or scattering of grease or oil sealed for lubrication. SOLUTION: The rotation introducing machine comprises an input shaft, an output shaft, and a bearing in the same space as that of the output shaft. The input shaft is air-tightly separated from the output shaft. The rotation of the input shaft is transmitted to the output shaft. At least one of the track surface of the inner ring of the bearing, the track surface of an outer ring and the rolling surface of a rolling element is covered with a lubricating film including a fluorine polymer having a functional group and perfluoro polyether (PFPE). COPYRIGHT: (C)2004,JPO
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