发明名称 Self-aligned, trenchless mangetoresitive random-access memory (MRAM) structure with sidewall containment of MRAM structure
摘要 This invention pertains to a method of fabricating a trenchless MRAM structure and to the resultant MRAM structure. The MRAM structure of the invention has a pinned layer formed within protective sidewalls formed over a substrate. The protective sidewalls facilitate formation of the MRAM structure by a self-aligning process.
申请公布号 US2003207471(A1) 申请公布日期 2003.11.06
申请号 US20030408450 申请日期 2003.04.08
申请人 DOAN TRUNG T.;LEE ROGER;KELLER DENNIS;SANDHU GURTEJ;EARL REN 发明人 DOAN TRUNG T.;LEE ROGER;KELLER DENNIS;SANDHU GURTEJ;EARL REN
分类号 H01L27/105;H01L21/8246;H01L27/22;H01L43/08;H01L43/12;(IPC1-7):H01L21/00 主分类号 H01L27/105
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