发明名称 |
Self-aligned, trenchless mangetoresitive random-access memory (MRAM) structure with sidewall containment of MRAM structure |
摘要 |
This invention pertains to a method of fabricating a trenchless MRAM structure and to the resultant MRAM structure. The MRAM structure of the invention has a pinned layer formed within protective sidewalls formed over a substrate. The protective sidewalls facilitate formation of the MRAM structure by a self-aligning process. |
申请公布号 |
US2003207471(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
US20030408450 |
申请日期 |
2003.04.08 |
申请人 |
DOAN TRUNG T.;LEE ROGER;KELLER DENNIS;SANDHU GURTEJ;EARL REN |
发明人 |
DOAN TRUNG T.;LEE ROGER;KELLER DENNIS;SANDHU GURTEJ;EARL REN |
分类号 |
H01L27/105;H01L21/8246;H01L27/22;H01L43/08;H01L43/12;(IPC1-7):H01L21/00 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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