发明名称 |
SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER, PROJECTION EXPOSURE DEVICE, AND PROJECTION EXPOSURE METHOD |
摘要 |
A synthetic quartz glass for optical member is used in an optical device having ArF excimer laser as a light source at energy density of 2 mJ/cm<2>/pulse or below or in an optical device having KrF excimer laser as a light source at energy density of 30 mJ/cm<2>/pulse or below. The synthetic quartz glass for optical member is characterized in that the hydrogen molecule concentration is in a range is equal to or greater than 1 x 10<16> molecules/cm<3> and smaller than 5 x 10<16> molecules/cm<3>.
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申请公布号 |
WO03091175(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
WO2003JP05193 |
申请日期 |
2003.04.23 |
申请人 |
ASAHI GLASS COMPANY, LIMITED;IKUTA, YOSHIAKI;AGATA, NORIYUKI |
发明人 |
IKUTA, YOSHIAKI;AGATA, NORIYUKI |
分类号 |
C03C3/06;G02B1/02;G03F7/20;(IPC1-7):C03C3/06;H01L21/027 |
主分类号 |
C03C3/06 |
代理机构 |
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