| 摘要 |
<P>PROBLEM TO BE SOLVED: To propose a method for designing an optical multilayer such as an anti-reflection film formed by using a genetic algorithm capable of designing an optical multilayer film with little characteristic change caused by a manufacturing error. <P>SOLUTION: In using the genetic algorithm to design an optical multilayer film structured by stacking n layers on a substrate, sensitivity showing the refractive index of thin films F being a gene and the degree of a change in film thickness is added as one of evaluation criteria in the calculation of the fitness of many multilayers composed of a combination of the thin films. Then, it is possible to obtain an optical multilayer film with low sensitivity, that is, with a small characteristic change caused by a manufacturing error. <P>COPYRIGHT: (C)2004,JPO |
