| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing nitrogen and an apparatus therefor capable of inexpensively producing heated nitrogen. SOLUTION: Reflow equipment 1 has the above apparatus 7 for producing nitrogen in which high temperature nitrogen is generated and a reflow treatment chamber 5 in which soldering is carried out. Nitrogen in the internal space 9 of a duct 8 is heated to a high temperature by supplying high temperature nitrogen to the space 10 at the outside of the duct 8 in the reflow treatment chamber 5. When each substrate 2 is carried in the duct 8 (internal space 9), solder on the substrate 2 is melted by the high temperature nitrogen and a semiconductor device is joined to the substrate 2. COPYRIGHT: (C)2004,JPO
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