发明名称 |
Micro-optics device and method for fabricating |
摘要 |
A micro-optics device and a method for fabricating the micro-optics device is provided using one or more layers of an optically-transparent polymer resist having a viscosity between 2,000 and 100,000 centipoise or that is otherwise sufficient to allow stacking of one or more layers of the resist at a thickness of at least 10 microns per layer of resist. Each layer of the polymer resist is deposited onto a substrate and defined photolithographically to build a discrete relief structure upon which a final smoothing layer of polymer resist can be applied.
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申请公布号 |
US2003207212(A1) |
申请公布日期 |
2003.11.06 |
申请号 |
US20020137630 |
申请日期 |
2002.05.02 |
申请人 |
LAW BENJAMIN PAIN-FONG;SIMON JONATHAN N.;GIBONEY KIRK S. |
发明人 |
LAW BENJAMIN PAIN-FONG;SIMON JONATHAN N.;GIBONEY KIRK S. |
分类号 |
G02B3/00;G03F7/00;(IPC1-7):G03C5/00 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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