发明名称 Micro-optics device and method for fabricating
摘要 A micro-optics device and a method for fabricating the micro-optics device is provided using one or more layers of an optically-transparent polymer resist having a viscosity between 2,000 and 100,000 centipoise or that is otherwise sufficient to allow stacking of one or more layers of the resist at a thickness of at least 10 microns per layer of resist. Each layer of the polymer resist is deposited onto a substrate and defined photolithographically to build a discrete relief structure upon which a final smoothing layer of polymer resist can be applied.
申请公布号 US2003207212(A1) 申请公布日期 2003.11.06
申请号 US20020137630 申请日期 2002.05.02
申请人 LAW BENJAMIN PAIN-FONG;SIMON JONATHAN N.;GIBONEY KIRK S. 发明人 LAW BENJAMIN PAIN-FONG;SIMON JONATHAN N.;GIBONEY KIRK S.
分类号 G02B3/00;G03F7/00;(IPC1-7):G03C5/00 主分类号 G02B3/00
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