Gas concentration sensor

摘要

When a sensor has deteriorated, the propagation time T1' of a first reflection wave becomes greater than the propagation time T1 of a first reflection wave as measured in a new sensor. If measurement of the concentration of a specific gas is based on the propagation time T1 of the first reflection wave as measured in the new sensor, gas concentration cannot be determined accurately. By contrast, a reflection wave other than the first reflection wave (for example, a second reflection wave) is merely reflected off the surface of the ultrasonic element and is not affected by the internal structure of the ultrasonic element. Therefore, even when the sensor is deteriorated, the propagation time T2, T2' of the second reflection wave exhibits less variation and is less susceptible to deterioration of the sensor. Therefore, the concentration of a specific gas is determined on the basis of the propagation time of the second reflection wave, which is less susceptible to deterioration of the sensor, instead of the propagation time of the first reflection wave, which is more susceptible to deterioration of the sensor. Thus, gas concentration can be measured accurately.