发明名称 TOOL PLATE FOR POLISHING
摘要 <P>PROBLEM TO BE SOLVED: To provide a tool for polishing used for a complex abrasive grain polishing method, improving machining efficiency, highly flattening a polished surface, with no possibility of occurrence of scratch, relatively less abrasion of the machined surface, and having long service life. <P>SOLUTION: This tool plate for polishing is used for the polishing method using a polishing abrasive made of mother grains and fine abrasive grains held on the mother grains. The tool plate is made of dense substrate having shore hardness smaller than that of the mother grains. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003311606(A) 申请公布日期 2003.11.05
申请号 JP20020126259 申请日期 2002.04.26
申请人 TANI YASUHIRO;NIHON MICRO COATING CO LTD;TOSHIBA CERAMICS CO LTD 发明人 TANI YASUHIRO;KAWADA KENJI;ENOMOTO TOSHIYUKI;TONAMI TOKIO;TOGAWA CHIHIRO
分类号 B24B37/00;B24B37/12;B24B37/14;B24B37/20;B24B37/24;H01L21/304 主分类号 B24B37/00
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