发明名称 CHEMICAL STORING CONTAINER FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A chemical storing container for manufacturing a semiconductor device is provided to be capable of economically using chemicals stored in the container and reducing fabrication cost by improving the structure of the container. CONSTITUTION: A chemical storing container(10) includes a storage space(11) for storing chemicals and a supply pipe(20) vertically inserted to the center portion of the storage space. At this time, the bottom surface(12) of the storage space is inclined downward from the end portion to the center portion, so that the bottom surface is shaped into a funnel form. Preferably, a groove(12a) is formed at the center portion of the bottom surface for fixedly inserting the supply pipe into the bottom portion of the chemical storing container.
申请公布号 KR20030085156(A) 申请公布日期 2003.11.05
申请号 KR20020023313 申请日期 2002.04.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, JIN U;SHIN, HYEONG SEOK
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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