METHOD AND APPARATUS FOR REPLACING LIQUID MATERIAL, METHOD OF MANUFACTURING ELECTRONIC DEVICE AND FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for replacing a liquid material in which clogging is reduced. SOLUTION: The liquid material is discharged as liquid drops from a discharge head 11 through a nozzle. When a 1st liquid material in the inside of the discharge head 11 is replaced by a 2nd liquid material in the replacing apparatus 10, the 2nd liquid material is introduced into the inside of the discharge head 11 after another replacing liquid is introduced into the inside of the discharge head 11 to bring the polarity of the liquid in the inside of the discharge head 11 close to that of the 2nd liquid material. COPYRIGHT: (C)2004,JPO