| 摘要 |
PURPOSE: A wafer transfer arm having an optical sensor and a pressure sensor is provided to be capable of preventing process failure by detecting whether the wafer transfer arm exactly holds a wafer, or not. CONSTITUTION: A wafer transfer arm is provided with the first chucking part(10) having a long inner groove, the second chucking part(20) connected to one end portion of the first chucking part, and the third chucking part(30) inserted along the long inner groove of the first chucking part. The wafer transfer arm further includes the first fixing part(40) located at one end portion of the third chucking part for fixing a wafer(W), the second fixing part(50) located at the end portion of the first chucking part, and the third fixing part(60) located at one end portion of the second chucking part. At this time, an optical sensor is loaded at the first fixing part and a pressure sensor is loaded at the second and third fixing parts, respectively.
|
