METHOD FOR MANUFACTURING DEVICE, APPARATUS FOR MANUFACTURING DEVICE, DEVICE AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method and manufacturing apparatus for a device capable of forming patterns of desired accuracy on respective different material layers if such material layers coexist in pattern forming regions on a substrate. SOLUTION: A first area BM1 consisting of a plurality of first unit regions of a grid form is set on one material layer of the pattern forming regions and a second area (BM2) consisting of a plurality of second unit regions of a grid form is set on the other material layer of the pattern forming regions. A first discharge operation is performed for the first area BM1 and a second discharge operation is performed for the second area BM2. COPYRIGHT: (C)2004,JPO