| 摘要 |
A drying processing apparatus for supplying a dry gas to a processing chamber 35, which houses therein semiconductor wafers W, to dry the semiconductor wafers W, comprises: a heater 32 for heating N2 gas serving as a carrier gas; a vapor generator 34 for making IPA misty by using the N2 gas heated by the heater 32 and for heating the IPA to produce said dry gas; and a flow control element 36 for supplying a predetermined rate of N2 gas to the processing chamber 35. Thus, it is possible to improve the efficiency of heat transfer of N2 gas, and it is possible to increase the amount of produced IPA gas and decrease the time to produce IPA gas. In addition, it is possible to prevent the turbulence of atmosphere in the processing chamber 35 after the drying processing is completed. <IMAGE> |
