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发明名称
摘要
申请公布号
JP3463362(B2)
申请公布日期
2003.11.05
申请号
JP19940196057
申请日期
1994.07.27
申请人
发明人
分类号
H05B33/10;G09F9/30;H01L27/32;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10
主分类号
H05B33/10
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代理人
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