| 摘要 |
PURPOSE: A method for preparing a positive electrode thin film for a thin film battery by using rapid thermal annealing and a thin film battery containing the positive electrode thin film prepared by the method are provided, to prevent the interface reaction between a thin film and a current collector and the deterioration of the surface of thin film due to the thermal annealing for a long period. CONSTITUTION: The method comprises the steps of evaporation depositing a thin film and thermal annealing it, wherein the thermal annealing is performed by increasing the temperature to 150-1,500 deg.C with a velocity of 1-100 deg.C/sec, maintaining the temperature for 10 sec to 30 min, and lowering the temperature to a room temperature with a velocity of 1-100 deg.C/sec. Preferably the thermal annealing is performed under at least one gas atmospheric condition selected from the group consisting of hydrogen, oxygen, nitrogen, argon, nitrous peroxide, nitrogen dioxide and air.
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