SEMICONDUCTOR MICROACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microactuator capable of substantiating a strong actuator force without losing heat insulation and supporting strength. SOLUTION: The semiconductor microactuator is equipped with: a frame 1 formed on a semiconductor substrate; a flexible area 21 protrudedly mounted on the inside of the frame 1 and displaced according to the temperature; a movable element 22 continuously disposed on one end of the flexible area 21 and is relatively displaced in the orthogonal direction of the opening surface of the frame 1; and a heat insulating area 3 provided at least between the flexible area 21 and the frame 1 and controls a heat conduction. The semiconductor microactuator is formed so that the coefficient of linear expansion of the heat insulating area 3 becomes lower towards the flexible area 21. COPYRIGHT: (C)2004,JPO