| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a working table which supports a workpiece with a small area by ameliorating an increase of a supporting area for supporting by a stage and an increase of an area interfering with a laser beam. <P>SOLUTION: Holding means 7 is provided with a cylindrical member 5 which is expandable and contractable in its upper part and a working shaft 23 which expands and contracts the upper part of the cylindrical member 5 cooperatively with an air cylinder 8. The upper part of the cylindrical member 5 is passed through a through-hole 2A of the workpiece 2 and the bottom of the workpiece 2 is placed on the supporting surface 22. When the working shaft 23 is thereafter lowered by the air cylinder 8, the upper part of the cylindrical member 5 is diametrically expanded by a diameter expansion section 23A at its top end and is strongly engaged with the through-hole 2A of the workpiece 2. As a result, the workpiece 2 is positioned and held in the prescribed position. <P>COPYRIGHT: (C)2004,JPO</p> |
